|
1103
|
A-Arm Grinding and Polishing
|
Custom
|
|
|
Good |
|
|
Specifications: Over Arm. Two machines available. Table size 33.5" diameter, Steel, precision drilled in matching patterns to bolt tooling to table. Table rotation is ~ 1.5 - 25 RPM, Stroke rotation ~ 1 -21 RPM; RPM's infinitely adjustable within range. Quill: Solid, machined ball. Gravity down pressure with manual weight limiter. Also included unused aluminum splash pans. Machines best used for mirrors up to apx 24" diameter. 28" with long radii has been manufactured with these machines. Dual 1.5 HP motors for either 220-230V single phase or 208V 3 phase as currently set up. Motors drive a helican gear reducer for maximum efficiency.
|
|
1198
|
Centering Machine
|
LOH
|
LZ80S
|
|
Good |
|
|
Specifications: Working range 10- 90mm, Automatic work piece feed by pre-orientated lifting out of a magazine tray. Recent use.
|
|
1196
|
Centering Machine
|
LOH
|
WG
|
|
Good |
|
|
Specifications: Bell clamp method, Working range 6-150 mm. Includes pump, right and left side spindles and mounting arbor. Fully operational.
|
|
1125
|
Centering machine
|
LOH
|
Centromatic 240 CNC
|
1992
|
Fair |
|
|
Specifications: Specs for this model: Working Range: 10-240 mm dia, Max thickness 40mm, Rotation Speed of tool: 3600 mm. Tool spindle: Number of tools 2, Lift per spindle 100mm, Positioning accuracy 0,0001mm. Centering Spindles: dia 60mm, Lift 55mm, rotational speed 1-80mm. 1 extra diamond included. One printed circuit board not functioning.
|
|
1100
|
Centering Machine
|
Saida
|
TRS-150
|
|
Very Good |
|
|
Specifications: Transfer Spindle Centering Machine. Work capacity Diameter 0-154mm (6"), Beveling angle 0-90 degrees.Work spindle rpm 32, 48, 72, 96,144, 216. 220V 3 ph. Transfer station included as shown. Additional spindles can be ordered.
|
|
1119
|
Centerless Grinder
|
Royal Master
|
TG-12x4
|
7 years
|
Excellent |
|
|
Specifications: Wheel dressing components; Infeed grinding components; wheels and wheel mounts; multi-blade cut-off wheel; 4" auto loading system for 4" rods. Original total $82K.
|
|
661
|
Coater
|
Denton
|
Integrity 18
|
1999
|
Excellent |
|
|
Specifications: SS Chamber 14" dia x 14" deep x 14" high. Full width door with 4" viewport. Bottom mounted pumping plenum, configured for Ion plating with biased substrate. Substrate rotation biassable via ferro fluidic feedthrough. Compumotor SX 106 motor Drive. Compumotor RP240 interface for programmable substrate rotation/jog contol.Kiaser Systems Inc. High Voltage (0-3000VDC) and control.Dual low voltage resistance sources.4KVA= 800Amp 5-10 volt taps. With amp meters.Complete GE-Fanuc 90-30 PLC Process control with MMI-200 Touch control panel. Auto process, Manual, and maintainance modes Dual Inficon XTC 2 Deposition controllers. Alcatel APT 150 Turbo pump with ACT 600T controller. Alcatel 2021 two stage rotary vane pump (14cfm). Foreline filter. Electro-pneumatic valving.
Varian Sentor CC2 Cold Cathode/thermocouple Vacuum Guage.MKS 627 with PDR-C-1C Baratron Control. MKS 2159c Mass Flow control with MKS 246 Power Supply. Agilent 34970A Data Logger. Four Circuit water manifold with Affinity Water circulator/ Chiller. Complete Documentation Drawings, Schematics and Spare parts.
Requires 208VAC 60hz 1ph 4 wire 50A service.Compressed air 6-7 bar. Process gas (Argon).
|
|
1155
|
Coating machine
|
CHA
|
SE1000
|
Refurbished
|
Very Good |
|
|
Specifications: 24x40 SS Belljar, DP 10 diffusion pump, Leybold Hereas mechanical pump. 4 pocket E-gun (rebuilt by EB sources), CV-8 Power supply with manual, Planetary system w/4 planets with maximum capacity of 8" dia each (all new bearings & o-rings). Glow discharge, 4 thermal-evaporation sources controlled by two SCR power controllers, each controller controls two sources w/selectors. Heater 2KW total control w/variable transformer. Extra Leybold Hereas mech pump and an IC6000 Crystal Monitor Deposition Controller (unkn condition, uninstalled) . Sycon TM-100 thickness monitor. 5 ton Chiler with new compressor. Toolbox with spare parts. Custom heater power supply w/Omega controller built & installed. 7.5 KVA 240 volt insolation transformer installed. Brooks Automation VGC IR SSRK RS2322CG vacuum gauge controller w/tubes & cables. Inficon ceramic retainer & crystal holder. Misc tooling. Misc coating materials. Mask was made and tested for dispersion and was better than 1%. PerkinElmer spectrophotometer LAMBDA 25 UV VIS FIXED REST W/SW V2.8 sold separately.
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|
1138
|
Continuous Polisher CP
|
Glassmaster
|
Plano Pro 520
|
New
|
Excellent |
|
|
Specifications: Planetary Polisher, 52" Cast Iron Table, Patented Syncroshaft carrier ring drive system. This is a new machine with two year warranty on all components. More pictures and Technical Specifications are in the New Equipment Showcase section on this website.
|
|
1077
|
CP
|
Strasbaugh
|
6BX
|
1996
|
Excellent |
|
|
Specifications: Recently refurbished. Machine is in fantastic condition. 48" CP, variable speed, approx 4 - 60 rpm. 408V 3 phase.
|
|
941
|
CP Continuous Polisher
|
Optical Lapping
|
72"
|
New
|
Excellent |
|
|
Specifications: 72" x 6" DC Powered Granite Continuous Polishing machine. Three powered stations driven by variable speed DC motors. Movable station rollers. 1/4 HP Motor on Bruiser Station. The Bruiser station has 2 DC motors, one to position the truing plate accurately and the other to drive the bruiser to turn consistently. Welded stainless steel drip pan sloped with 2 drain positions. New components. Pictures included show a previously built machine that has been sold and delivered. Call for further specs. Larger machines such as 76" or 100" and bigger can be built.
|
|
14
|
CP Continuous Polisher
|
Strasbaugh
|
6BZ
|
1980
|
Good |
|
|
Specifications: 96" CP Polisher, Infinitely Variable Speed, Powered Rings, 100HP Hydraulic Motor Driven Table, Recirulating Slurry System, Pneumatic Air pressure heads, Aluminum table with no Serrations over Cast Iron Sub-Table. 36" Aluminum Rings, Granite Conditioner.
|
|
719
|
Cylinder Drum Polisher
|
Custom
|
PC-800
|
New
|
Excellent |
|
|
Specifications: Cylinder Capacity: Diameter 1"-8", Length 2"-8", Stroke: 0-8", Spindle speed: 0-78 RPM, Center to Center: 10", Spindle Dia 1.5", Spindle & Stroke Motors: 1/4HP. Two Spindle Machine designed for producing cylinder lens up to 4" radius & 8" long. Massive aluminum overarms to dampen vibration. Variable drum & stroke speed. Stainless slurry pan with drain easily removable. DC motors, controllers, ball & linear bearings are 'off the shelf' items for easy maintenance. Footprint 5' x 5' 6". 120V 60 cycle 15 amps.
|
|
1115
|
Double Sided Planetary
|
Custom
|
Grinder/Polisher
|
unkn
|
Good |
|
|
Specifications: Double Sided Grinder / Polisher. Parts of a maximum diameter of 4 1/4" can be processed. The grinder and polisher rings are 18" diameter with a 10" diameter center hole. A total of 12 grinder / polisher rings are included. Any grinder ring can be made into a polisher. Machine is in use now and works fine. There are very many septums both with holes for various shaped parts and as blanks that can be cut for any shape.
|
|
862
|
Draper
|
SAGA
|
Tilt Table
|
Rebuilt in 1998
|
Very Good |
|
|
Specifications: Machine is in good running condition and can be demo'ed. In use now. 1 HP , 220V single phase motors on the table and stroke drive. (originally 3 phase and original motors are available and included), Speeds are controlled by split pulley Vari-Drives. Table Tilts for testing, The table bolts to a large flange at the top of the main spindle shaft and can be easily removed to install a larger table, Currently has a 36" table on it, but it will hold a 48". Footprint 6'x12'. Rebuild included a complete tear down, sand blast and repaint with new bearings everywhere. Would like to replace this machine with an A-arm.
|
|
646
|
E-Beam System
|
Custom
|
|
apx 15 yrs + see specs
|
Excellent |
|
|
Specifications: Metal Bell jar, 6" x 6" stationary platform, VHS6 diffusion pump, LN2 trap. 4 pocket Airco gun, CV8 power supply plus sweep controls. (Power supply and gun apx 10 yrs old.)Inficon XTM/2 deposition con troller. DC Plasma power supply for preclean. Installed and working.
|
|
928
|
Edger
|
Nakamura Tome
|
OMT-VC
|
1978
|
Excellent |
|
|
Specifications: Automatic Edger. Rebuilt machine for edging 20 pieces continuously. Electronic position sensor.
|
|
161
|
Etcher or Glass Coating Machine
|
Varian
|
Zylin 30
|
apx 15-20 years
|
Excellent |
|
|
Specifications: Cassette to Cassette, 6" wafer, Stainless Steel, 3 separate chambers, New cost 240K. Basically unused except for test runs. 3 Alcatel pumps, Leybold Blower, Computers, Manuals.
|
|
153
|
Flat Screen Substrate Cleaner
|
ULTRA t Equipment
|
FSC132
|
Unused
|
Excellent |
|
|
Specifications: Submicron cleaning of flat panels & large substrates up to 23" on the diagonal. Oscillating high pressure DI water jet up to 2500 PSI. Three adjustable spin speeds, infrared heat lamp for drying. Built-in exhaust blower. Programmable Microproscessor, Manual.
|
|
746
|
Grinder
|
Blanchard
|
#18
|
42 years
|
Good |
|
|
Specifications: Purchased new in 1962. serial # 10578. Has a 36" magnetic chuck. 35 HP
|
|
1000
|
Grinder
|
Custom
|
36"
|
|
|
|
|
Specifications: As pictured. 208 3 phase with ground.
|
|
1194
|
Grinder
|
Lapmaster
|
24B
|
|
Very Good |
|
|
Specifications: Refurbished. Completely disassembled, striped & powder coated, Bearing, brushes & gears replaced where needed. Fully rewired. New programmable, solid state, variable speed controllers installed. Anodized aluminum yoke arms, etc. Single Sided Grinding machine. 3 phase 220V 60 Hz. Has 16 inch Brass lap inside an aluminum pan. Can be refit with a 24 inch cast iron platen by simply taking off the aluminum pan. More specs available upon request.
|
|
1192
|
Grinder
|
Lapmaster
|
24B
|
|
Very Good |
|
|
Specifications: Refurbished. Completely disassembled, striped & powder coated, Bearing, brushes & gears replaced where needed. Fully rewired. New programmable, solid state, variable speed controllers installed. Anodized aluminum yoke arms, etc. Single Sided Grinding machine. 3 phase 220V 60 Hz. Has 24 inch cast Iron Platen. More specs available upon request.
|
|
1193
|
Grinder
|
Lapmaster
|
24B
|
|
Very Good |
|
|
Specifications: Refurbished. Completely disassembled, striped & powder coated, Bearing, brushes & gears replaced where needed. Fully rewired. New programmable, solid state, variable speed controllers installed. Anodized aluminum yoke arms, etc. Single Sided Grinding machine. 3 phase 220V 60 Hz. Has 24 inch Brass Platen. More specs available upon request.
|
|
1189
|
Grinder Polisher
|
Strasbaugh
|
R6Y-1
|
|
Excellent |
|
|
Specifications: Pan size 18". Completely rebuilt with new equipment: New 303 Stainless teel shaft, 1/4 HP gear motor 33:1 Ratio 90V DC (Baldor), 1/2 HP spindle motor 90V DC (Lesson), Gear reducer 5:1 Ratio (Lesson), SCR Motor Speed Control (Minarik). Machine has been stripped, sanded, primed and powder coated.
|
|
645
|
Ion Milling System
|
Ion Tech
|
Sourcerer CHA SEC 1000 RAP
|
1995
|
Excellent |
|
|
Specifications: Ion Tech/CHA SEC 1000-RAP, computer controlled or manual. Ion-Tech 21cm DC gun, plasma bridge neutralizer, Ion-Tech MPS 5001 power supplies (automatic control of beam parameters) GFC 1000 gas control unit control Argon flow plus additional gases, CTI 10 onboard cryopump & compressor, CFT 75 chiller for substrate cooling, Installed tooling for 6, 3" wafers, dual rotational planetary, also available 6" water cooled substrate table. Unused past three years.
|
|
177
|
Lap Lathe
|
Strasbaugh
|
37C
|
1986
|
Good |
|
|
Specifications: Unused last 9+ years. 2 di to 20 di Range +/-. Enclosed canopy, Lap spins in rotary motion, cutter moves slowly in wide arc. Auto cycle. 110V 1 phase.
|
|
1140
|
Lapper
|
|
36"
|
unkn
|
Good |
|
|
Specifications: 36" precision lapping machine, Heavy duty, radial groove 36" flex-o-lap 1-1/2" thick. New 3 hp motor.
|
|
624
|
Lapper
|
PR Hoffman
|
PR1 32 Tooth Machine
|
Rebuilt 2000
|
Excellent |
|
|
Specifications: Double Sided, Automatic pnuematic plate lifters, Cole Palmer master Flex Variable speed slurry system, variable speed drive, extra lapping plates, Easily converted to 66Tooth. 110 volts
|
|
623
|
Lapper
|
PR Hoffman
|
PR1 32 Tooth Machine
|
Rebuilt 2000
|
Excellent |
|
|
Specifications: Double Sided, Automatic Pnuematic Plate Lifters, Slurry Mixer ( for 2 machines), Cole Plamer Master Flex variable speed slurry system, variable plate speed, Easily converted to 66 Tooth.110 Volts
|
|
622
|
Lapper
|
PR Hoffman
|
PR1 32 Tooth
|
Rebuilt 1999
|
Very Good |
|
|
Specifications: Double Sided, Automatic pnuematic plate lifters, Cole Palmer master Flex Variable speed slurry system, variable speed drive, extra lapping plates, Easily converted to 66Tooth. 110 volts
|
|
621
|
Lapper
|
PR Hoffman
|
PR1 32 Tooth
|
Rebuilt 1999
|
Very Good |
|
|
Specifications: Doudle Sided, Automatic pnuematic plate lifters, Cole Palmer master Flex Variable speed slurry system, variable speed drive, extra lapping plates, Easily converted to 66Tooth. 110 volts
|
|
620
|
Lapper
|
PR Hoffman
|
PR1 66 Tooth
|
Rebuilt 1998
|
Very Good |
|
|
Specifications: Double Sided, Automatic Pnuematic Plate lifters, 110 volts
|
|
619
|
Lapper
|
PR Hoffman
|
PR1 66 Tooth
|
Rebuilt 1998
|
Very Good |
|
|
Specifications: Double Sided, Automatic pnuematic plate lifter, 110 Volts.
|
|
625
|
Lapper
|
PR Hoffman
|
PR2 bench top lapping/polishing
|
|
Good |
|
|
Specifications: 5 machines available. All 110 Volts
|
|
1157
|
Lapper Double Sided
|
Speedfam
|
5B-8L
|
1987
|
Excellent |
|
|
Specifications: 15" Double Sided Lapping Machine. Will hold eight 4 3/8" carriers, With a 3 3/8" part circle. Hour meter indicates only 158 hours of use. Includes 5 truing gears. 220/220V, 3PH.
|
|
888
|
Lapping and Polishing Machine
|
LOH
|
PLM 400
|
1979
|
Unknown |
|
|
Specifications: Specs for this model: Working range max 400 mm dia, Tool dia max 500 mm, Workpiece height max 350 mm. Pan size 700 mm dia, Single spindle. Spindle speed: Lapping 240/330/480/670 rpm, Polishing 230 rpm.
|
|
1127
|
Mill and Cutter
|
Strausak
|
124 9414
|
1980's ?
|
Very Good |
|
|
Specifications: Swiss made machine. Original use for Sharpening Milling Bits. Recent use with custom made adaptor (not incuded) to center small lenses. Precision movement. Volt 550/60. Machine will be sold in it's unaltered state.
|
|
389
|
Milling Machine
|
LOH
|
UMFS 1000
|
1979
|
Good |
|
|
Specifications: 4 Milling units, Horizontal, Vertical, Universal and Rounding (needs Diamond for Rounding). Max slide movement 1300 mm Max processing length 1000 mm. Machine table 1400 x 290 mm. 230V/3ph.
|
|
1085
|
Polisher
|
Nord
|
|
Rebuilt
|
|
|
|
Specifications: 2 Spindle - tabletop polisher, Spindle spacing: 14", Power Requirements: 208/220V 10a. Size: 30" X 27" X 22" high. Shipping weight (estimate): 320 lbs. Spindle Speed: 10 - 400 RPM, Spindle Drive: 1/2 HP DC common, Spindle Thread: 5/8" - 11. Oscillation Drive: 30 RPM common, Stroke Length, 0 to 3" adjustable, Stroke Displacement: 0 to 4" off center. Slurry Ready, Cycle Timer: 0 to 60 minutes, Overarm Pressure: 0 to 30 lbs. Compressed air required for overarm pressure. The machine has been rebuilt.
|
|
37
|
Polisher
|
Nord
|
HVR-1-3-DCT
|
1980's
|
Very Good |
|
|
Specifications: High Speed Polisher, Long Radius. Capacity >130 mm Radius, <200 diameter. Variable speed DC Motors can be controlled manually or by program. Quill 1/6 HP, Spindle 1.0 HP, Oscillation 1/2 HP, Quill Pressure is Pneumatic. Power 15A-3Ph-220V size: 38"x31"x75" WDH.
|
|
899
|
Polisher
|
NORD
|
PL12-2-2DCTLS
|
|
Fair |
|
|
Specifications: 2 Spindle machine. Variable speed, DC motors, Each spindle runs independently. 10" work block capacity. Last used in 2000. Performed well. Lower spindle may need bearings replaced. Speed Control indicator missing. One machine available…Front machine in picture.
|
|
1086
|
Polisher
|
SAGA
|
100
|
|
Good |
|
|
Specifications: Two machines. 14" capacity. Saga Single Spindle Polisher, Power Requirements: 110V Size: 18W" X 36L" X 37H", Shipping weight (estimate): 300 lbs. Spindle Speed: 15 - 225 RPM. Spindle Drive: 3/4 HP DC. Spindle Thread: 1" - 8 TPI. Oscillation Speed: 0 to 76 SPM. Oscillation Drive: 1/2 HP DC. Stroke Length: 0 to 5" adjustable. Stroke Displacement :0 to 3" off center adjustable. Age unknown, machines modified in 1993 with DC motors.
|
|
1144
|
Polisher
|
SAGA
|
150
|
unkn
|
Good |
|
|
Specifications: 40" capacity, pneumatic down pressure, splash pan. Tilt spindle expandable to larger diameters, 24" lapping tool, 208/3phase. In Good to Very Good condition.
|
|
866
|
Polisher
|
Strasbaugh
|
6Y-4
|
70's ?
|
Fair |
|
|
Specifications: In use now, needs one or two gear boxes replaced, perhaps bearings on the spindle, 16" capacity, Good deal for anyone wanting to put some work into it. Sold as is. Glass flats not included.
|
|
1139
|
Polisher
|
Strasbaugh
|
6DA-1
|
1984
|
Very Good |
|
|
Specifications: 16" capacity, pneumatics, pump slurry system with stainless steel pan and reservoir, timer. 208 3 phase.
|
|
1130
|
Polisher
|
Strasbaugh
|
6CQ
|
1979
|
Very Good |
|
|
Specifications: X - Y Motion. Specs for this model: Quill Drive (upper) front to rear motion (Y axis) 22" ininitely adjustable via mechanical variable eccentric drive. Work platform (Lower) side to side motion (X axis) same. Offset adjustments X & Y, 4" each side of center, each axis independently. Stainless steel splash pan: 42" x 44" x 16" max ht. (travels with lower work platform) 208V 3 ph, 7HP. Apx wgt 5500 lbs, dims: 90" x 60" x 54" WDH. Rotary table under actual work stage. Has pneumatic polishing pressure control system.
|
|
1142
|
Polisher
|
Strasbaugh
|
6CR-DC
|
unkn
|
Good to Very Good |
|
|
Specifications: 36" Stainless Splash Pan, 32" capacity for this model, 2 speed ranges, pneumatic down pressure, two quill arms, high torque. 208 single phase.
|
|
1141
|
Polisher
|
Udagawa Mildex
|
350
|
unkn
|
Very Good |
|
|
Specifications: 16" capacity, 2 Stations with 2 motors per station. Pneumatics, full splash/slurry pan, 3 phase.
|
|
311
|
Polisher Lapper
|
Elgin
|
4 spindle 10"/12"
|
unknown
|
Good |
|
|
Specifications: This unit has a few abarth gear boxes that need to be reconditioned
|
|
1023
|
Polisher Double Eccentric
|
Custom
|
27" pan
|
unkn
|
Good |
|
|
Specifications: Draper, 27" pan size, variable spindle speeds. One eccentric is variable speed. This machine is suitable for plano, long radia and zone polishing. 220V, 3PH. (side covers are not shown in pictures but they are included)
|
|
1094
|
Polisher double sided
|
Speedfam
|
9B
|
?
|
Very Good |
|
|
Specifications: Setup as a polisher. stainless steel plates. pad polishing. 30 inch plates/ 5 carriers. One 5 hp motor. 220V 3ph. Rebuilt. Used only apx 100 hours since rebuild.
|
|
744
|
Rotary Grinding Table
|
Custom Built
|
N/A
|
40 years
|
Good |
|
|
Specifications: Custom built 36" grinding table
|
|
227
|
Sputtering System
|
Cooke Vacuum Products, Inc
|
C71-3 RF/DC
|
|
Very Good |
|
|
Specifications: Single 5" target, Suitable for prototype or lab applications, Manuals. Complete and Operational. More info to follow.
|
|
317
|
Stick Polisher
|
AO
|
|
40's
|
Good |
|
|
Specifications: Polisher/Grinder, Short Radius <=35mm, 6 Spindles and 1 Correcting Spindle, Pulley drive, Top drive on spindle. Everything works, Cast aluminum bowls recirculate slurry without pump, sample tools, 82"x34"x72" WDH, cast iron table.
|
|
725
|
Stick Polisher
|
Strasbaugh
|
6K
|
1964
|
Very Good |
|
|
Specifications: Refurbished. 6 spindle stick machine. Stainless steel slurry pan with lock line nozzels. Radial motion with individual small offset. Eccentric motion 0 to 45 degrees either side of center. Oscillating offset apx 20 degrees, Glass capacity Max 3", Lower spindle, raise or lower 1.5", Upper spindle, shaft adj up and down, 1.5", machine dims: 60"x21"x48" LWH.
|
|
1188
|
Surface Grinder
|
Chevalier
|
FSG-818AD
|
1989
|
Very Good |
|
|
Specifications: 8" x 18" Table, Precision Surface Grinder with Programmable (microprocessor) Automatic Incremental Downfeed. Integrated coolant tank and pump system. Danetsu Electromagnetic table. Over Wheel Dresser. Full specs on request.
|
|
768
|
Ultrasonic Glass Etching
|
Sonic Mill
|
|
|
Please Select |
|
|
Specifications: Ultrasonic glass etching tool with controlled 12" X-Y stage, Sturdy base and new tooling. Can be used or adapted for many types of mateial removal tasks. Documentation, computer and stag controllers included.
|
|
1098
|
Vacuum Coater
|
Custom
|
|
|
Very Good |
|
|
Specifications: Box Coater Vacuum System, Can be used for rapid production, chamber is water cooled & leak free. Chamber similar to Balzers BAK 760, 34" diameter clear x 36" high. One port for 4" x 36" sputter cathode. Pumps to crossover in 5 mins. Low six range under twenty mins. Varian 20" diffusion pump, Kinney Blower/Roughing Pkg, Two butterfly/gate valves bypassing main valve to allow plasma cleaning & sputtering pressures to be maintained. Centered ports on top & bottom of chamber. Manual control panel in control console. Includes MKS 286, Thermocouple Gauge Readout and MKS 290 Ion Gauge Readout.
|
|
935
|
Vacuum System In Line
|
Custom
|
|
|
Excellent |
|
|
Specifications: Vacuum system for vertical in line process development. Interior volume is 60"H X 13"W X 96"L. Composed of 4 separable chambers of 24" length. Panels on sides, top & bottom removable. Multiple ports available in side panels for process feed throughs. Equipped with 10" Varian diffusion pump, also 10" variable orifice unit for pressure control. Mechanical pumping by Edwards EH250 Blower w/E2M40 roughing pump. Each chamber module is 2 feet in length, overall internal is 8 feet. Each pair of chambers mounted on their own rollable base. Tight system that goes quickly into the 10-7 range.
|
|
